[20a-C101-1~13] 7.3 Micro/Nano patterning and fabrication

[20a-C101-4] Verification of Resist Patterning by Stereophonic Projection Lithography Using a Pair of Parabolic Mirrors Illuminated by Collimated Light from a Blue Light-Emitting-Diode

〇Toshiyuki Horiuchi¹, Hiroshi Kobayashi¹ (1.Tokyo Denki Univ.)

Keywords:stereophonic projection lithography, parabolic mirror, collimated illumination

Resist patterning was demonstrated by stereophonic projection lithography using a pair of faced parabolic mirrors. A spoon with patterns on the surface was used as the reticle object. The reticle object was placed at the center of the lower mirror, and it was illuminated obliquely from the bottom by a collimated light from a blue light-emitting-diode source. When the illumination angle and the light source position were optimized, images of patterns on the reticle object were projected clearly on a spoon coated with a resist film. Resist patterns were successfully printed by the projection exposure and the following development.