3:30 PM - 3:45 PM
[20p-B201-8] Optical characterization of highly Si doped-AlxGa1-xN grown via sputtering
Keywords:sputtering, AlGaN, doping
Oral presentation
15 Crystal Engineering » 15.4 III-V-group nitride crystals
Tue. Sep 20, 2022 1:30 PM - 6:00 PM B201 (B201)
Tsutomu Araki(Ritsumeikan Univ.), Atsushi Kobayashi(Univ. of Tokyo), Yusuke Hayashi(Osaka Univ.)
3:30 PM - 3:45 PM
Keywords:sputtering, AlGaN, doping