The 83rd JSAP Autumn Meeting 2022

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13 Semiconductors » 13.4 Si processing /Si based thin film / MEMS / Equipment technology

[21a-A406-1~8] 13.4 Si processing /Si based thin film / MEMS / Equipment technology

Wed. Sep 21, 2022 9:00 AM - 11:15 AM A406 (A406)

Kaoru Toko(Univ. of Tsukuba), Junji Yamanaka(Univ. of Yamanashi)

10:15 AM - 10:30 AM

[21a-A406-5] Schottky Barrier Characterization of Pt/GeSn Contacts for Opt-Electronics Application

〇Noboru Shimizu1, Yi Wang1, Keisuke Yamamoto1, Shiyu Zhang2, Shigehisa Shibayama2, Osamu Nakatsuka2,3, Dong Wang1 (1.IGSES, Kyushu Univ., 2.GS of Eng., Nagoya Univ., 3.IMaSS, Nagoya Univ.)

Keywords:Germaniumu-tin (GeSn), Metal/GeSn contacts