The 83rd JSAP Autumn Meeting 2022

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13 Semiconductors » 13.4 Si processing /Si based thin film / MEMS / Equipment technology

[21a-A406-1~8] 13.4 Si processing /Si based thin film / MEMS / Equipment technology

Wed. Sep 21, 2022 9:00 AM - 11:15 AM A406 (A406)

Kaoru Toko(Univ. of Tsukuba), Junji Yamanaka(Univ. of Yamanashi)

10:30 AM - 10:45 AM

[21a-A406-6] Formation of Rectifying Schottky Contact on Polycrsysalline P-type Ge

〇Kenta Moto1,2, Kaoru Toko3, Tomonari Takayama1, Toshifumi Imajo3, Keisuke Yamamoto1 (1.Kyushu Univ., 2.JSPS Res. Fellow, 3.Univ. of Tsukuba)

Keywords:polycrystalline Ge, Schottky barrier diode, rectifying contact