[21p-B104-1~8] Semiconductor Manufacturing and Process Technologies for Green Transformation

[21p-B104-3] Strategic Challenges for Green Innovation in Wafer Processing

〇Masaru Hori¹, Makoto Sekine¹, Kenji Ishikawa¹ (1.Nagoya Univ.)

Keywords:plasma process, manufacturing science, sustainable society

In order to realize a sustainable society, CO₂ emission reduction targets have been set for all manufacturing technologies, and manufacturing without consideration for the environment is on the verge of collapse. Plasma is used in more than 80% of large-scale integrated circuit manufacturing, and the energy emitted from plasma processes is tremendously large. On the other hand, it should be seen as an opportunity to revolutionize conventional miniaturization and 3D packaging. This presentation will introduce the potential for environmental innovation in wafer processing.