[21p-B104-1~8] Semiconductor Manufacturing and Process Technologies for Green Transformation

[21p-B104-4] Challenge of calculating and reducing LCCO₂ in Semiconductor Production Equipment

〇Jun Shibukawa¹ (1.SCREEN Semiconductor Solutions Co., Ltd)

Keywords:semiconductor production, life cycle, CO2

We would like to introduce our efforts to reduce CO2 emissions in the semiconductor production equipment business, especially our efforts to calculate and reduce CO2 in the entire life cycle from product manufacturing to disposal, along with current issues.