[21p-B104-1~8] Semiconductor Manufacturing and Process Technologies for Green Transformation

[21p-B104-8] Panel Discussion

〇Toshihiko Kanayama¹, Koji ICHIMURA², Jun SHIBUKAWA³, Sumie SEGAWA⁴, Masahiko ISHIDA⁵, Hitoshi WAKABAYASHI⁶, Masaru HORI⁷, Fumihiro INOUE⁸ (1.AIST, 2.DNP, 3.SCREEN, 4.TEL, 5.NEC, 6.Tokyo Tech, 7.Nagoya Univ, 8.YNU)

Keywords:Semiconductor manufacturing technology, Circular Economy, Life Cycle Assessment

The panel will discuss what issues we should tackle to achieve sustainable green development of semiconductor manufacturing.