Symposium (Oral)
[21p-B104-1~8] Semiconductor Manufacturing and Process Technologies for Green Transformation
Wed. Sep 21, 2022 1:30 PM - 5:30 PM B104 (B104)
Hitoshi Wakabayashi(Tokyo Tech), Noriyuki Uchida(AIST)
△：Presentation by Applicant for JSAP Young Scientists Presentation Award
▲：English Presentation
▼：Both of Above
No Mark：None of Above
1:30 PM - 1:40 PM
〇Kazuya Masu1 (1.Tokyo Tech)
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1:40 PM - 2:10 PM
〇Koji Ichimura1, Masaaki Kurihara1 (1.Dai Nippon Printing)
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2:10 PM - 2:40 PM
〇Masaru Hori1, Makoto Sekine1, Kenji Ishikawa1 (1.Nagoya Univ.)
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2:40 PM - 3:10 PM
〇Jun Shibukawa1 (1.SCREEN Semiconductor Solutions Co., Ltd)
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3:15 PM - 3:45 PM
〇Masahiko Ishida1,2 (1.NEC Corp., 2.AIST)
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3:45 PM - 4:15 PM
〇Fumihiro Inoue1 (1.Yokohama National Univ.)
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4:15 PM - 4:45 PM
〇Hitoshi Wakabayashi1 (1.Tokyo Tech)
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4:45 PM - 5:30 PM
〇Toshihiko Kanayama1, Koji ICHIMURA2, Jun SHIBUKAWA3, Sumie SEGAWA4, Masahiko ISHIDA5, Hitoshi WAKABAYASHI6, Masaru HORI7, Fumihiro INOUE8 (1.AIST, 2.DNP, 3.SCREEN, 4.TEL, 5.NEC, 6.Tokyo Tech, 7.Nagoya Univ, 8.YNU)
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