[22a-A406-1~5] 13.4 Si系プロセス・Si系薄膜・MEMS・装置技術

▲ [22a-A406-4] Tailoring of Magnetic Sensing Performances of Single-crystal Diamond MEMS Magnetic Sensors via Interlayers

〇(P)Zilong Zhang¹、Liwen Sang¹、Yasuo Koide¹、Satoshi Koizumi¹、Meiyong Liao¹ (1.NIMS)

キーワード：Diamond, MEMS, Magnetic sensor

Single-crystal diamond (SCD) is a promising material to fabricate high-performance and high-reliability MEMS devices. Based on delta E effect, the SCD resonator coupling with a magneto-strictive FeGa film provides an ideal structure to realize magnetic sensing. In this work, the high-temperature magnetic sensing performances of SCD-based resonators are tailored by the various interlayers. For a Ti interlayer, it greatly reduces the lattice mismatch of FeGa/SCD interface and improves the interface bonding force. For a WC interlayer, it regulates the orientation of FeGa film and improves the interface bonding force. The magnetic sensing performances of these magnetic sensors are enhanced by the temperature increasing. The FeGa/SCD magnetic sensor has the weakest magnetic sensitivity of 2 Hz/mT@573 K. The FeGa/WC/Ti/SCD magnetic sensor exhibits the best magnetic sensitivity of 75.4 Hz/mT@673 K. At the high-temperature of 773 K, the FeGa/Ti/SCD magnetic sensor is stable, exhibiting the magnetic sensitivity of 71.1 Hz/mT, the tested magnetic noise of 10 nT/√Hz. This high-temperature magnetic sensing performance is in the world-advance level.