[22p-A406-1~15] 8.2 Plasma deposition of thin film, plasma etching and surface treatment

[22p-A406-14] Crystallinity control of LiTiO film by plasma sputtering and its application to the negative electrode of Li-ion batteries

〇Misao Kiga¹, Yamada Teruya¹, Hanai Ryo¹, Masumoto Kodai¹, Uchida Giichiro^1,2 (1.Meijo Univ., 2.Ene.Inst Meijo Univ.)

Keywords:sputtering, Li ion battery