Oral presentation
8 Plasma Electronics » 8.2 Plasma deposition of thin film, plasma etching and surface treatment
Thu. Sep 22, 2022 1:00 PM - 5:00 PM A406 (A406)
Toru Harigai(Toyohashi Univ. of Tech.), Takayoshi Tsutsumi(名大)
△：Presentation by Applicant for JSAP Young Scientists Presentation Award
▲：English Presentation
▼：Both of Above
No Mark：None of Above
1:00 PM - 1:15 PM
〇Shota Nunomura1, Isao Sakata1, Kazunori Koga2, Masaharu Shiratani2 (1.AIST, 2.Kyushu Univ.)
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1:15 PM - 1:30 PM
〇Takahiro Goya1, Keiichiro Urabe1, Koji Eriguchi1 (1.Kyoto Univ.)
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1:30 PM - 1:45 PM
〇Akiko Hirata1, Masanaga Fukasawa1, J. U. Tercero2, Katsuhisa Kugimiya1, Yoshiya Hagimoto1, Kazuhiro Karahashi2, Satoshi Hamaguchi2, Hayato Iwamoto1 (1.Sony Semiconductor Solutions Corp., 2.Osaka Univ.)
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1:45 PM - 2:00 PM
〇Kazunori Shinoda1, Katsuya Miura1, Kenji Maeda2, Masaru Izawa2, Thi-Thuy-Nga Nguyen3, Kenji Ishikawa3, Masaru Hori3 (1.Hitachi R&D, 2.Hitachi High-Tech, 3.Nagoya Univ.)
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2:00 PM - 2:15 PM
〇Kosei Kubota1, Kazuo Takahashi1 (1.KIT)
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2:15 PM - 2:30 PM
〇(M2)Hibiki Kato1, Hiroaki Hanafusa1, Takuma Sato1, Seiichirou Higashi1 (1.Graduate School of Advanced Science and Engineering, Hiroshima Univ.)
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2:30 PM - 2:45 PM
〇Yuto Seki1, Haruhito Kato1, Shuichi Kuboi1, Haruka Suzuki1,2, Hirotaka Toyoda1,2,3 (1.Nagoya Univ., 2.cLPS, Nagoya Univ., 3.NIFS)
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2:45 PM - 3:00 PM
〇Keita Ichikawa1, Haruka Suzuki1, Daiki Iino2, Hiroyuki Hukumizu2, Kazuaki Kurihara2, Hirotaka Toyoda1,3 (1.Nagoya Univ., 2.Kioxia Corp., 3.NIFS)
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3:15 PM - 3:30 PM
〇Kosuke Takenaka1, Yuji Hayashi1, Susumu Toko1, Akinori Ebe2, Yuichi Setsuhara1 (1.Osaka Univ., 2.EMD Corp.)
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3:30 PM - 3:45 PM
〇Daisuke Ohori1, Yi-Ho Chen2, Takuya Ozaki1, Kazuhiko Endo3, Yiming Li2, Seiji Samukawa2,1,4 (1.IFS, Tohoku Univ., 2.NYCU, 3.AIST, 4.AIMR, Tohoku Univ.)
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3:45 PM - 4:00 PM
〇Toru Takeya1, Okada Takeru1 (1.Grad. Sch. Eng. Tohoku Univ.)
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4:00 PM - 4:15 PM
〇Akihiro Yamamoto1, Iori Nagao1, Yuma Yamamoto1, Michihiro Otaka1, Daisuke Yamashita1, Kunihiro Kamataki1, Takamasa Okumura1, Naoto Yamashita1, Naho Itagaki1, Kazunori Koga1,2, Masaharu Shiratani1 (1.Kyushu Univ., 2.NINS.)
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4:15 PM - 4:30 PM
〇(M1C)Miyuki Nishimura1, Takayuki Ohta1 (1.Meijo Univ.)
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4:30 PM - 4:45 PM
〇Misao Kiga1, Yamada Teruya1, Hanai Ryo1, Masumoto Kodai1, Uchida Giichiro1,2 (1.Meijo Univ., 2.Ene.Inst Meijo Univ.)
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4:45 PM - 5:00 PM
〇Hiroharu Kawasaki1, Tamiko Ohshima1, Yoshihito Yagyu1, Takeshi Ihara1, Yusuke Hibino1, Takeshi Satake1,2, Shin-ichi Aoqui2 (1.Nai'l Ins. Tech. Sasebo Col., 2.Sojo Univ.)
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