11:00 AM - 11:15 AM
[23a-B101-8] Effect of post-treatment with atmospheric pressure plasma on metal oxide thin films deposited by mist CVD
Keywords:surface treatment, atmospheric pressure plasma, mist CVD
Presentation information
Oral presentation
8 Plasma Electronics » 8.2 Plasma deposition of thin film, plasma etching and surface treatment
[23a-B101-1~10] 8.2 Plasma deposition of thin film, plasma etching and surface treatment
Fri. Sep 23, 2022 9:00 AM - 11:45 AM B101 (B101)
Kosuke Takenaka(Osaka Univ.), Giichiro Uchida(Meijo Univ)