The 69th JSAP Spring Meeting 2022

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7 Beam Technology and Nanofabrication » 7.2 Applications and technologies of electron beams

[26a-F308-1~8] 7.2 Applications and technologies of electron beams

Sat. Mar 26, 2022 9:00 AM - 11:15 AM F308 (F308)

Mitsunori Kitta(AIST), Takafumi Ishida(Nagoya University)

10:15 AM - 10:30 AM

[26a-F308-5] Ultrafast pump-probe measurement of scanning electron microscopy by vertically illuminating configuration

〇Yuuga Emoto1, Yuki Yamamoto1, Yusuke Arashida1, Keishi Akada1, Shoji Yoshida1, Jun-ichi Fujita1 (1.Univ. of Tsukuba)

Keywords:scanning electron microscopy, time-resolved measurement, semiconductor