Tatsuya Okada

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Speaker, Author, Co-Author

Wed. Mar 15, 2023 1:00 PM - 5:30 PM B410 (Building No. 2)

Oral presentation
| 13 Semiconductors
| 13.4 Si processing /Si based thin film / MEMS / Equipment technology

[15p-B410-1~15] 13.4 Si processing /Si based thin film / MEMS / Equipment technology

5:00 PM - 5:15 PM

[15p-B410-14] Crystallization of a-Si Films Deposited by RF Sputtering using Blue Direct Diode Laser (Part 3)

〇Tatsuya Okada¹, Takashi Noguchi¹, Mitsuoki Hishida², Kentaro Miyano², Naohiko Kobata², Masaki Nobuoka² (1.Univ. Ryukyus, 2.Panasonic Connect)