Crystallization of a-Si Films Deposited by RF Sputtering using Blue Direct Diode Laser (Part 3)

Presentation information

Oral presentation

13 Semiconductors » 13.4 Si processing /Si based thin film / MEMS / Equipment technology

Wed. Mar 15, 2023 1:00 PM - 5:30 PM B410 (Building No. 2)

Masato Sone(Tokyo Tech), Fumito Imura(Hundred Semiconductors Inc.)

5:00 PM - 5:15 PM

〇Tatsuya Okada¹, Takashi Noguchi¹, Mitsuoki Hishida², Kentaro Miyano², Naohiko Kobata², Masaki Nobuoka² (1.Univ. Ryukyus, 2.Panasonic Connect)

Keywords:Blue Direct Diode Laser