Tatsuya Sagawa

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Speaker, Author, Co-Author

Wed. Mar 15, 2023 1:00 PM - 5:30 PM B410 (Building No. 2)

Oral presentation
| 13 Semiconductors
| 13.4 Si processing /Si based thin film / MEMS / Equipment technology

[15p-B410-1~15] 13.4 Si processing /Si based thin film / MEMS / Equipment technology

2:30 PM - 2:45 PM

[15p-B410-6] Thickness dependence of poly-Si_1-xGe_x TFT characteristics on glass substrates

〇Tatsuya Sagawa¹, Akito Hara¹ (1.Tohoku Gakuin Univ.)