2:30 PM - 2:45 PM
[15p-B410-6] Thickness dependence of poly-Si1-xGex TFT characteristics on glass substrates
Keywords:Semiconductor, SiGe, TFT
Presentation information
Oral presentation
13 Semiconductors » 13.4 Si processing /Si based thin film / MEMS / Equipment technology
[15p-B410-1~15] 13.4 Si processing /Si based thin film / MEMS / Equipment technology
Wed. Mar 15, 2023 1:00 PM - 5:30 PM B410 (Building No. 2)
Masato Sone(Tokyo Tech), Fumito Imura(Hundred Semiconductors Inc.)