Session information

Oral presentation

8 Plasma Electronics » 8.1 Plasma production and diagnostics

[16a-A402-1~6] 8.1 Plasma production and diagnostics

Thu. Mar 16, 2023 9:15 AM - 10:45 AM A402 (Building No. 6)

△：Presentation by Applicant for JSAP Young Scientists Presentation Award
▲：English Presentation
▼：Both of Above
No Mark：None of Above

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9:15 AM - 9:30 AM

[16a-A402-1] Evaluation of short-lived reactive oxygen species generated by plasma jet

Yamato Torii¹, Yuta Matsumoto², Ryosuke Otsuki², Tatsuru Shirafuji^1,2, 〇JunSeok Oh^1,2 (1.Osaka City Univ., 2.Osaka Metropol. Univ.)

9:30 AM - 9:45 AM

[16a-A402-2] Liquid Treatment Using a DBD-embedded Micro Contactor

〇Tatsuru Shirafuji¹, Haruki Kato¹, Sayaka Yamamoto¹, Jun-Seok Oh¹, Motoko Takaoka² (1.Osaka Met. Univ., 2.Kobe Coll.)

9:45 AM - 10:00 AM

[16a-A402-3] Effect of antenna design of curling probe utilized for material processing plasma on a reflected spectrum

〇(M1)Shota Kato¹, Keiji Nakamura¹, Daisuke Ogawa¹ (1.Chubu Univ.)

10:00 AM - 10:15 AM

[16a-A402-4] Influence of ion bombardments to curling probe embedded into an electrode

〇Yuki Kihira¹, Keiji Nakamura¹, Daisuke Ogawa¹ (1.Chubu Univ.)

10:15 AM - 10:30 AM

[16a-A402-5] Evaluation of plasma structure from emission image

〇(M1)Kenta Harada¹, Kyuzo Manabu¹, Toyoda Hirotaka^1,2,3, Oodati Satoshi³ (1.Nagooya Univ., 2.cLPS, Nagoya Univ., 3.NIFS)

10:30 AM - 10:45 AM

[16a-A402-6] Effect of power modulation scheme on ion composition in a dual-frequency capacitively-coupled Ar/C₄F₈/O₂ plasma

〇Haruhito Kato¹, Yudai Akatuka¹, Yuto Seki¹, Shuichi Kuboi¹, Haruka Suzuki^1,2, Hirotaka Toyoda^1,2,3 (1.Nagoya Univ, 2.cLPS, Nagoya Univ, 3.NIFS)

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