The 70th JSAP Spring Meeting 2023

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6 Thin Films and Surfaces » 6.1 Ferroelectric thin films

[15p-A404-1~19] 6.1 Ferroelectric thin films

Wed. Mar 15, 2023 1:00 PM - 6:30 PM A404 (Building No. 6)

Tomoaki Yamada(Nagoya Univ.), Takao Shimizu(NIMS), Hiroshi Uchida(Sophia Univ.), Minoru Noda(Kyoto Institute of Technology)

6:00 PM - 6:15 PM

[15p-A404-18] Evaluation of the effect of prior plasma nitriding on plasma-oxidized AlScN by AR-HAXPES

〇Tomoya Tsutsumi1, Kazuki Goshima1, Yoshiharu Kirihara1, Tatsuki Okazaki2, Akira Yasui3, Kuniyuki Kakushima4, Yuichiro Mitani1,2, Hiroshi Nohira1 (1.Tokyo City Univ, 2.Adv. Res. Lab., Tokyo City Univ., 3.JASRI, 4.Tokyo Institute of Technology)

Keywords:AlScN, HAXPES, plasma oxidation