Low-Temperature Synthesis of High-Electron Mobility GeSn Thin Films on Insulators

Presentation information

Oral presentation

13 Semiconductors » 13.4 Si processing /Si based thin film / MEMS / Equipment technology

Wed. Mar 15, 2023 1:00 PM - 5:30 PM B410 (Building No. 2)

Masato Sone(Tokyo Tech), Fumito Imura(Hundred Semiconductors Inc.)

4:15 PM - 4:30 PM

〇Koki Nozawa¹, Takeshi Nishida^1,2, Takashi Suemasu¹, Kaoru Toko¹ (1.Univ. of. Tsukuba, 2.JSPS Research Fellow)

Keywords:semicondutor, transistor