The 70th JSAP Spring Meeting 2023

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13 Semiconductors » 13.4 Si processing /Si based thin film / MEMS / Equipment technology

[15p-B410-1~15] 13.4 Si processing /Si based thin film / MEMS / Equipment technology

Wed. Mar 15, 2023 1:00 PM - 5:30 PM B410 (Building No. 2)

Masato Sone(Tokyo Tech), Fumito Imura(Hundred Semiconductors Inc.)

4:45 PM - 5:00 PM

[15p-B410-13] Crystallization of InSb Films on Glass by RTA

Takashi Kajiwara1, Tatsuya Okada2, Koswaththage Charith Jayanada2, Takashi Noguchi2, 〇Taizoh Sadoh1 (1.Kyushu Univ., 2.Univ. of the Ryukyus)

Keywords:semiconductor, InSb

ガラス基板上におけるInSn薄膜の急速熱処理法(RTA)による結晶成長を検討した ので報告する。