3:30 PM - 3:45 PM
[15p-D209-8] Investigation of TiN coating on Si emitter for realization of high current electron source
Keywords:Field emitter array, Si emitter
Presentation information
Oral presentation
7 Beam Technology and Nanofabrication » 7.2 Applications and technologies of electron beams
[15p-D209-1~12] 7.2 Applications and technologies of electron beams
Wed. Mar 15, 2023 1:30 PM - 4:45 PM D209 (Building No. 11)
Katsuhisa Murakami(AIST), Takafumi Ishida(Nagoya University)