Design of serpentine spring for MEMS devices by gold multi-layer metal technology

Kisuke Miyado; Akira Onishi; Devi Srujana Tennteni; Katsuyuki Machida; Parthojit Chakraborty; Masato Sone; Yoshihiro Miyake; Hiroyuki Ito

Presentation information

Oral presentation

13 Semiconductors » 13.4 Si processing /Si based thin film / MEMS / Equipment technology

[16a-B410-1~9] 13.4 Si processing /Si based thin film / MEMS / Equipment technology

Thu. Mar 16, 2023 9:00 AM - 11:30 AM B410 (Building No. 2)

Masato Sone(Tokyo Tech), Reo Kometani(Univ. of Tokyo)

10:30 AM - 10:45 AM

△ [16a-B410-6] Design of serpentine spring for MEMS devices by gold multi-layer metal technology

〇(B)Kisuke Miyado¹, Akira Onishi¹, Devi Srujana Tennteni¹, Katsuyuki Machida¹, Parthojit Chakraborty¹, Masato Sone¹, Yoshihiro Miyake¹, Hiroyuki Ito¹ (1.Tokyo Tech)

Keywords:MEMS, serpentine flexure, gold multi-layer metal technology

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