9:15 AM - 9:30 AM
[18a-A301-2] Dependence of channel mobility in GaN-MOSFET on gate oxide deposition methods
Keywords:GaN, MOSFET, mobility
Presentation information
Oral presentation
13 Semiconductors » 13.7 Compound and power devices, process technology and characterization
[18a-A301-1~13] 13.7 Compound and power devices, process technology and characterization
Sat. Mar 18, 2023 9:00 AM - 12:30 PM A301 (Building No. 6)
Kozo Makiyama(Sumitomo Electric Industries, Ltd.)