[18p-A205-1~5] 8.5 Plasma phenomena, emerging area of plasmas and their new applications

[18p-A205-3] Discharge-pulse designs and Optical Emission Spectroscopy in Intermittent Deep Oscillation Magnetron Sputtering

〇Eisuke Yokoyama¹, Tomoki Nagai¹, Kaita Tsutsui¹, Nobuo Nishimiya¹, Masaomi Sanekata¹, Masahide Tona², Hiroaki Yamamoto², Keizo Tsukamoto², Kiyokazu Fuke³, Keijiro Ohshimo⁴, Fuminori Misaizu⁴ (1.Tokyo Polytech. Univ., 2.Ayabo Corp., 3.Kobe Univ., 4.Tohoku Univ.)

Keywords:pulsed sputtering, optical emission spectroscopy, deep oscillation magnetron sputtering

Deep oscillation magnetron sputtering (DOMS), which is operated using a comb-like pulsed power waveform consisting a voltage oscillation train with short-on/off micropulses, has been shown an excellent performance to arc-free depositions. However, sputtered metal particle ions formed in typical DOMS steeply decrease after the second pulse discharge for the first pulse discharge for micropulses. In the present study, we propose a new DOMS operating system, which consists of intermittent micropulses with segments of several micropulses (called intermittent DOMS), in order to investigate avoiding the steep decreases of the sputtered metal particle ions observed after the second micropulse in the DOMS operations. The increasing effect of sputtered metal particle ions will be discussed based on results of optical emission spectroscopy (OES) observed in the intermittent DOMSs.