[1Ba01-09] Surface Science(SS3) Structure

[1Ba02(2022論文賞)] Spatial analytical surface structure mapping for three-dimensional micro-shaped Si by micro-beam reflection high-energy electron diffraction

*Tadashi Abukawa¹, Sohei Nakatsuka, Taishi Imaizumi, Azusa N Hattori², Hidekazu Tanaka², Ken Hattori³ (1. SRIS, Tohoku University, 2. SANKEN, Osaka University, 3. Graduate School of Science and Technology, Nara Institute of Science and Technology)

Spatially arranged surfaces on the micro-rod structure, which
was three-dimensionally (3D) architected on a Si(110) substrate have been thoroughly investigated by a system with micro-beam reflection high-energy electron diffraction (μ-RHEED) and scan- ning electron microscopy (SEM).