[1Bp01-04] Plasma Science and Technology (PST)

[1Bp02] Hard diamond-like carbon thin film deposited by multi pulse HiPIMS

*Kenta Ozeki¹, Takashi Kimura¹ (1. Graduate School of Engineering, Nagoya Institute of Technology)

Diamond-like carbon (DLC) thin films were synthesized via a multi pulse high-power impulse magnetron sputtering (HiPIMS) at an Ar gas pressure of 0.6 Pa and an average power of 80 W. We investigated the relationship between the microstructure of the DLC film and the setting parameters, such as the pulse number, the pulse interval, the pulse width, and the peak value of the target current. The first HiPIMS plasma temporally evolved during a pulse-on time of the voltage source with a width of about 13 μs and the discharge current reached -45 A. After the application of the first-pulse voltage for HiPIMS, multi-pulse voltages were applied to produce the multi pulse HiPIMS. The results of Raman spectroscopy indicated that the sp³ content of the DLC films synthesized by multi pulse HiPIMS was higher than that of the film synthesized by single HiPIMS.