[1Cp01-07] Surface Analysis/Applied Surface Science/Evaluation Technique (ASS)

[1Cp03] Evaluation of high-resolution spectra extracted from cube data measured by spectrum imaging method of AES

*Kenichi Tsutsumi¹, Konomi Ikita¹, Tatsuya Uchida¹, Kazushiro Yokouchi¹, Akihiro Tanaka¹, Toshiyuki Ohama¹, Noboru Taguchi² (1. JEOL Ltd., 2. National Institute of Advanced Industrial Science and Technology (AIST))

Recently developed Spectrum Imaging for Auger electron spectroscopy (AES) would be a next-generation analysis method providing cube data image with a wide spectrum at all pixels. By the post data processing, the cube data can provide any total spectrum within any regions as you selected, and it can also reconstruct another meaning map by focusing on a slight difference of direct/differential spectra, for example, energy-filtered secondary electron images, elemental maps, chemical state maps and REELS maps. In this presentation, we will explain the overview of Spectrum Imaging and its possibilities, and introduce some applications.