[1Ga01-10] Thin Film (TF)

[1Ga05] Reflectance and conductivity distributions of sputter-deposited thin films on a two-dimensional diagram with incident energy and substrate temperature

*Ichiro Ikeda¹, Kohei Kuroshima¹, Yasuhito Gotoh², Masashi Iguchi¹, Shigeji Sugimoto¹ (1. Osaka Vacuum, Ltd., 2. Department of Electronic Science and Engineering, Kyoto University)

We have already confirmed that Anders' structure zone diagram (SZD) is applicable to conventional magnetron sputtering. Regarding the conductivity distribution of the Ti film on Anders' SZD, it was confirmed that there was a difference in the distribution depending on the conditions, therefore the distribution was obtained again by lowering the ultimate pressure. In addition, we investigated the reflectance distribution on the SZD and confirmed the relationship between each distribution and the film structure. As a result, about the distribution of the conductivity, it was confirmed that a contour line became parallel to ZONE border on the SZD, and the film property that reflects the film structure is well explained by the SZD.