[1Ga01-10] Thin Film (TF)

[1Ga10] Automatic peak detection and crystal phase identification in X-ray diffraction of thin films aiming for autonomous experiments

*Kei Takihara¹, Nishio Kazunori¹, Ryo Nakayama², Akira Aiba¹, Shigeru Kobayashi², Ryota Shimizu², Taro Hitosugi^2,1 (1. School of Materials and Chemical Technology, Tokyo Institute of Technology, 2. Department of Chemistry, The University of Tokyo)

We are constructing an automated and autonomous experimental system connecting various measurement and analysis instruments such as X-ray diffraction (XRD), Raman spectroscopy, UV-visible spectroscopy, and scanning electron microscopy/energy dispersive X-ray spectroscopy, to explore novel Li ion conductors. For thin films, there is no report on the automatic XRD analysis methods due to the limitation of a few diffraction peaks. In this study, we report an automated XRD analysis method for thin film samples. We performed the automation of peak detection and crystal phase identification using LiCoO₂(001) epitaxial thin films as a model case. We succeeded in the extraction of thin film peaks originating from 003, 006, 009, 0012 and 0015 reflections of LiCoO₂, which is consistent with the previous report.