[1Hp01-06] Semiconductor/Magnetic, Electronic, and Photonic devices/Electronic Material Processing (SE/TF/EMP/MI/MS)

[1Hp06] Tall ZnO nanorods grown on NiCu fabrics for flexible thermoelectric devices

*Hiroya Ikeda¹, Naoki Fujiwara¹, Koki Kato¹, Rohini Palanisamy², Pandiyarasan Veluswamy², Navaneethan Mani³, Masaru Shimomura¹, Yasuhiro Hayakawa¹, Toshitaka Yamakawa⁴, Kazushi Ikeda⁴, Hiromu Hamasaki¹ (1. Shizuoka University, 2. Indian Institute of Information Technology, Design and Manufacuturing, Kancheepuram, 3. Sri Ramaswamy Memorial Institute of Science and Technology, 4. Nara Institute of Science and Technology)

For developing wearable power generators and self-powered wireless physiological sensors based on thermoelectoric devices, we have investigated the vertical growth of taller ZnO nanorods on conductive NiCu fabrics by microwave-assisted solvothermal synthesis. ZnO nanostructures were formed on a NiCu fabric substrate using two-step microwave-assisted solvothermal synthesis. Based on solvothermal synthesis with microwave, some seeds of ZnO were fixed on the fabric in the first step, and ZnO nanorods grew up in the second step. In this study, we repeated the growth process (second step) for making the ZnO nanorod longer. From scanning electron microscope images, it was found that the fabric surface is fully covered with dense nanorods and that the diameter and height of nanorods increase linearly by repeating the growth process. This suggests that we can obtain the ZnO nanorods with a desired length.