2023 International Conference on Solid State Devices and Materials

Presentation information

Print

Oral Presentation

02: Advanced and Emerging Memories / New Applications

[H-5] Ferroelectric Memory Materials

Fri. Sep 8, 2023 9:00 AM - 10:15 AM Room H (232, Bldg. 2)

Session Chairs: Grenouillet Laurent (CEA-Leti), Halid Mulaosmanovic (GlobalFoundries., Germany)

9:30 AM - 9:45 AM

[H-5-03] Switching Characteristics and Endurance Analysis of Nanolaminated Ferroelectric HZO Gate Stack with Al 2O 3 for Back-End-of-Line Applications

○Cheng-Hung Wu1, Chun-Jung Su2, Vita Pi-Ho Hu1 (1. National Taiwan Univ. (Taiwan), 2. National Yang Ming Chiao Tung Univ. (Taiwan))

https://doi.org/10.7567/SSDM.2023.H-5-03

Abstract password authentication.
PA password is required to view abstracts. You can find the password in the "Advance Program".The "Advance Program" is handed out at the registration desk to registered participants.

Password