2023 International Conference on Solid State Devices and Materials

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Oral Presentation

02: Advanced and Emerging Memories / New Applications

[H-5] Ferroelectric Memory Materials

Fri. Sep 8, 2023 9:00 AM - 10:15 AM Room H (232, Bldg. 2)

Session Chairs: Grenouillet Laurent (CEA-Leti), Halid Mulaosmanovic (GlobalFoundries., Germany)

9:45 AM - 10:00 AM

[H-5-04] Laminate-Thickness-Dependent Switching Dynamics of HfO 2-ZrO 2 Ferroelectric Nanolaminate Capacitors

○Xiaoyu Ke1,2, Junshuai Chai1,2, Hao Xu1,2, Xiaolei Wang1,2, Wenwu Wang1,2 (1. Key Lab. of Microelectronics Devices and Integrated Tech., Inst. of Microelectronics, Chinese Academy of Sci. (China), 2. College of Integrated Circuits, Univ. of Chinese Academy of Sci. (China))

https://doi.org/10.7567/SSDM.2023.H-5-04

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