[2-4] Anomalous Enhancement of Etching Rate of Silicon Nitride with HF Etchant by Ion Implantation

Y. Akasaka、K. Horie K. Nomura、S. Kawazu (1.Central Research Laboratory, Mitsubishi Electric Corp.、2.Kitaitami Works)

1973 International Conference on Solid State Devices |PDF ダウンロード

[2-5] Ion Implantation into MOS Structures

Takashi Tokuyama (1.Central Research Laboratory, Hitachi Ltd.)

1973 International Conference on Solid State Devices |PDF ダウンロード

[2-6] Crystal Defects in Ion-Implanted GaAs

M. Tamura、T. Miyazaki、N. Natsuaki (1.Central Research Laboratory, Hitachi Ltd.)

1973 International Conference on Solid State Devices |PDF ダウンロード

[2-7] P-TYPE ZINC SULPHIDE PRODUCTION BY ION IMPLANTATION OF SILVER

Georgobiani A. N.、Kotlyrevskiy M. ь.、Noskov D. A.、Zlobin V. N.、Shumilov V.、Generalov Yu. P. (1.P. N. Lebedev Physical Institute Academy of Sciences Of the USSR)

1973 International Conference on Solid State Devices |PDF ダウンロード

[2-8] Ion Implanted ZnSe p-n Junction Devices

Y. S. Park、B. K. Shin (1.Aerospace Research Laboratories、2.Systems Research Laboratories, Inc.)

1973 International Conference on Solid State Devices |PDF ダウンロード

[2-9] Mn-IMPLANTED ZnS THIN FILM ELECTROLUMINESCENT CELL

TOSHINORI TAKAGI、ISAO YAMADA、AKIO SASAKI、TOYOTSUGU ISHIBASHI (1.Department of Electronics, Kyoto University)

1973 International Conference on Solid State Devices |PDF ダウンロード

[S-3] Optoelectronic Device (I)

P. Dean I. Hayashi (1.Royal Radar Establishment、2.Nippon Electric Co., Ltd.)

1973 International Conference on Solid State Devices |PDF ダウンロード

[3-1] SPECTRAL AND SPATIAL BEHAVIOR OF LUMINESCENCE FROM THE ACTIVE LAYER OF GaAs-Ga1-xAlxAs DOUBLE HETEROSTRUCTUER LASER DIODES

O. NAKADA、R. ITO、H. NAKASHIMA、N. CHINONE (1.Central Research Laboratory, Hitachi, Ltd.)

1973 International Conference on Solid State Devices |PDF ダウンロード

[3-2] Visible Light-Emitting Semiconductor Lasers of Double Heterostructure

Kunio Itoh (1.Research Laboratory, Matsushita Electronics Corp.)

1973 International Conference on Solid State Devices |PDF ダウンロード

[3-3] Heterostructure CdS1-xSex Surface Lasers

Mitsuo Kawabe、Hideo Kotani、Kohzoh Masuda、Susumu Namba (1.Faculty of Engineering Science, Osaka University)

1973 International Conference on Solid State Devices |PDF ダウンロード