[A-0-2] SILICON WIZARDRY

M. P. Lepselter、C. H. Sequin (1.Bell Laboratories)

1976 International Conference on Solid State Devices |PDF ダウンロード

[A-0-3] The Potential of Electron Beam Technology for Microfabrication

T. H. P. Chang (1.IBM T. J. Watson Research Center)

1976 International Conference on Solid State Devices |PDF ダウンロード

[A-0-4] Growth and Doping Kinetics in Molecular Beam Epitaxy

B. A. Joyce、C. T. Foxon (1.Mullard Research Laboratories)

1976 International Conference on Solid State Devices |PDF ダウンロード

[A-0-5] Integrated Optics

A. Yariv (1.California Institute of Technology)

1976 International Conference on Solid State Devices |PDF ダウンロード

[A-1-1] New Developments in Materials and Processing Aspects of Silicon Device Technology

Bruce E. Deal (1.Fairchild Camera and Instrument Corporation)

1976 International Conference on Solid State Devices |PDF ダウンロード

[A-1-2] A New Technique for Low Concentration Diffusion of Boron into Silicon

Ginjiro Kambara、Susumu Koike、Toshio Matsuda、Morio Inoue (1.Research Laboratory, Matsushita Electronics Corporation)

1976 International Conference on Solid State Devices |PDF ダウンロード

[A-1-3] Stepped Electrode Transistor : SET

Tetsushi Sakai、Yoshio Sunohara、Yutaka Sakakibara、Junichi Murota (1.Musashino Electrical Communication Laboratory Nippon Telegraph and Telephone public Corporation)

1976 International Conference on Solid State Devices |PDF ダウンロード

[A-1-4] Anomalous Residual Defects in Silicon after Annealing of Through-Oxide Phosphorus Implanted Samples

N. Natsuaki、M. Tamura、M. Miyao、T. Tokuyama (1.Central Research Laboratory, Hitachi Ltd.)

1976 International Conference on Solid State Devices |PDF ダウンロード

[A-1-5] Schottky Barrier Height Control by Using Knock-on Effect in Ion Implantation

Hiroshi Ishiwara、Seijiro Furukawa (1.Graduate School of Science and Engineering, Tokyo Institute of Technology)

1976 International Conference on Solid State Devices |PDF ダウンロード

[A-1-6] PRESENT STATUS AND FUTURE ASPECTS OF THE ELECTRON BEAM EXPOSURE DEVICES

Jacques TROTEL、Georges PIRCHER (1.THOMSON-CSF- Central Research Laboratory)

1976 International Conference on Solid State Devices |PDF ダウンロード