[A-0-1] A LSI FACTORY OF THE NEW AGE

P. WANG (1.TEXAS INSTRUMENTS INCORPORATED)

1977 Conference on Solid State Devices |PDF ダウンロード

[A-1-1] Direct Electron Beam Writing of Devices and Circuits on Silicon

L. D. Yau、L. R. Thibault (1.Bell Laboratories)

1977 Conference on Solid State Devices |PDF ダウンロード

T. Nishimura、H. Kotani、S. Matsui、O. Nakagawa、H. Aritome、S. Namba (1.Faculty of Engineering Science Osaka University)

1977 Conference on Solid State Devices |PDF ダウンロード

Tsunehachi Ishitani、Hideo Kodama、Tsuneta Sudo (1.Musashino Electrical Communication Laboratory / Nippon Tel.-Tel. Public Corp.)

1977 Conference on Solid State Devices |PDF ダウンロード

Yoshio Nishi、Hisashi Hara (1.Toshiba Research and Development Center Tokyo Shibaura Electric Co., Ltd.)

1977 Conference on Solid State Devices |PDF ダウンロード

T. Mochizuki、K. Shibata、T. Inoue、K. Ohuchi (1.Toshiba Reseach and Development Center Tokyo Shibaura Electric Co., Ltd.)

1977 Conference on Solid State Devices |PDF ダウンロード

Tohru Nakamura、Toshiaki Masuhara、Shojiro Asai (1.Central Research Laboratory, Hitachi, Ltd.)

1977 Conference on Solid State Devices |PDF ダウンロード

Masanori Kikuchi、Shuichi Ohya、Machio Yamagishi (1.IC Division, Nippon Electric Company Ltd.)

1977 Conference on Solid State Devices |PDF ダウンロード

N. Ieda、E. Arai、K. Kiuchi、Y. Ohmori、K. Takeya (1.Electrical Communication Laboratories, Nippon Telegraph and Telephone Public Corporation)

1977 Conference on Solid State Devices |PDF ダウンロード

O. Minato、T. Sasaki、R. Hori、M. Kubo、N. Hashimoto、H. Yoshimura (1.Central Research Laboratory, Hitachi Ltd.)

1977 Conference on Solid State Devices |PDF ダウンロード