[B-1-3] VLSI AND LARGE SYSTEMS

ROBERT W. KEYES (1.IBM RESEARCH)

1983 Conference on Solid State Devices and Materials |PDF ダウンロード

[B-2-7FP] ASPECTS OF RESEARCH AND DEVELOPMENT IN III-V SEMICONDUCTORS IN BRITISH INDUSTRY AND UNIVERSITIES

P. N. Robson (1.Department of Electronic and Electrical Engineering University of Sheffield)

1983 Conference on Solid State Devices and Materials |PDF ダウンロード

[A-3-7LN] 3-Dimensional IC's Fabricated by Using Ar+ Laser Recrystallization

Nobuo Sasaki、Seiichiro Kawamura、Takashi Iwai、Ryouichi Mukai、Motoo Nakano、Mikio Takagi (1.IC Development Division, Fujitsu Limited)

1983 Conference on Solid State Devices and Materials |PDF ダウンロード

[A-7-10LN] A Very Small "Super-8" Size CCD Image Sensor

Kenju Horii、Takao Kuroda、Toshihiro Kuriyama、Yoshimitsu Hiroshima Yoshiaki Sone、Takao Kunii (1.Semiconductor Laboratory, Matsushita Electronics Corporation)

1983 Conference on Solid State Devices and Materials |PDF ダウンロード

[C-3-1LN] FOCUSED BORON ION BEAM IMPLANTATION INTO SILICON

M. TAMURA、S. SHUKURI、T. ISHITANI、H. TAMURA (1.Central Research Laboratory, Hitachi Ltd.)

1983 Conference on Solid State Devices and Materials |PDF ダウンロード

[C-3-2LN] LARGE AREA EXPOSURE IN SYNCHROTRON RADIATION LITHOGRAPHY UTILIZING THE STEERING OF THE ELECTRON ORBIT IN THE STORAGE RING

Hiroshi TANINO、Koichiro HOH、Masahiro HIRATA、Shingo ICHIMURA、Nobufumi ATODA、Takio TOMIMASU、Tsutomu NOGUCHI、Suguru SUGIYAMA、Tetsuo YAMAZAKI (1.Electrotechnical Laboratory)

1983 Conference on Solid State Devices and Materials |PDF ダウンロード

[C-3-3LN] Photoluminescence Study on the Behavior of Self-Interstitials in Annealed Si Crystals

Michio Tajima、U. Gosele、J. Weber、R. Sauer (1.Max-Planck-Institut fur Festkorperforschung、2.Max-Planck-Institut fur Metallforscung, Institut fur Physik、3.Physikalishes Institut, Universitat Stuttgart)

1983 Conference on Solid State Devices and Materials |PDF ダウンロード

[C-3-4LN] FABRICATION OF SUBMICRON SEMICONDUCTOR DEVICES BY HOLOGRAPHIC METHOD --- IV SUBMICRON GATE PROCESS

N. NOMURA、Y. HIROFUJI、T. EDAMATSU、K. KUGIMIYA (1.Central Research Lab., Matsushita Electric Industrial Co., Ltd.)

1983 Conference on Solid State Devices and Materials |PDF ダウンロード

[C-3-5LN] A4-16 bits/mm Contact Type High Speed Image Sensor Using an a-Si:H Photodetector Array

Kouhei SUZUKI、Ken-ichi MORI、Yoshiyuki SUDA、Satoshi TAKAYAMA、Toshio NAKAI、Osamu TAKIKAWA、Tamio SAITO (1.TOSHIBA R&D Center)

1983 Conference on Solid State Devices and Materials |PDF ダウンロード

[C-3-6LN] Optical Confinement Type a-Si:H Solar Cell Using Milky Tin Oxide on Glass

H. Iida、T. Mishuku、Y. Hayashi (1.Technical Laboratory, Taiyo Yuden Co., LTD.、2.Electrotechnical Laboratory)

1983 Conference on Solid State Devices and Materials |PDF ダウンロード