[C-2-7] Deposition and Properties of Silicon Nitride Film by Si2F6-N2-H2 Glow Discharge

K. Yamazaki, Y. Numasawa, K. Hamano (1.NEC Corporation, VLSI Development Division)

1985 Conference on Solid State Devices and Materials |PDF Download

[C-3-1] Substitutional Oxygen in Silicon

W. C. O'Mara (1.Aeolus Laboratory)

1985 Conference on Solid State Devices and Materials |PDF Download

T. Ohshima, A. Ishizaka, K. Nakagawa, Y. Shiraki (1.Central Research Laboratory, Hitachi, Ltd.)

1985 Conference on Solid State Devices and Materials |PDF Download

Y. Hirofuji, N. Matsuo, K. Kugimiya (1.Semiconductor Research Center, Matsushita Elect. Ind. Co., Ltd.)

1985 Conference on Solid State Devices and Materials |PDF Download

Naoaki Aizaki, Toru Tatsumi (1.Fundamental Research Laboratories, NEC Corporation)

1985 Conference on Solid State Devices and Materials |PDF Download

Hiroshi Yamada, Yasuhiro Torii (1.NTT Atsugi Electrical Communication Laboratories)

1985 Conference on Solid State Devices and Materials |PDF Download

1985 Conference on Solid State Devices and Materials |PDF Download

M. Hirose, H. Matsunami (1.Hiroshima University, 2.Kyoto Unviersity)

1985 Conference on Solid State Devices and Materials |PDF Download

O. Ozawa, H. Sunami (1.Semiconductor Device Engineering Laboratory, Toshiba, 2.Central Research Laboratory, Hitachi)

1985 Conference on Solid State Devices and Materials |PDF Download

1985 Conference on Solid State Devices and Materials |PDF Download

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