[R-F] Reliability Aspects of Metallization

E. Arai, H. Ishikawa (1.Atsugi Electrical Communication Laboratories, NTT, 2.Fujitsu Laboratories Ltd.)

1985 Conference on Solid State Devices and Materials |PDF Download

[A-4-1] Ionized Cluster Beam Epitaxy of Single Crystalline Aluminum Films on Semiconductors and Insulators as an Approach to New Device Structures

I. Yamada, H. Usui, H. Inokawa, T. Takagi (1.Ion Beam Engineering Experimental Laboratory, Kyoto University)

1985 Conference on Solid State Devices and Materials |PDF Download

M. Muto, T. Kato, T. Ito, H. Ishikawa (1.Fujitsu Laboratories Ltd.)

1985 Conference on Solid State Devices and Materials |PDF Download

T. Okamoto, K. Tsukamoto, M. Shimizu, Y. Mashiko, T. Matsukawa (1.LSI R&D Lab. Mitsubishi Electric Corp.)

1985 Conference on Solid State Devices and Materials |PDF Download

Nobuyoshi NATSUAKI, Kiyonori OHYU, Tadashi SUZUKI, Nobuyoshi KOBAYASHI, Naotaka HASHIMOTO, Yasuo WADA (1.Central Research Laboratory, Hitachi Ltd.)

1985 Conference on Solid State Devices and Materials |PDF Download

KATSUYUKI MACHIDA, HIDEO OIKAWA (1.NTT Atsugi Electrical Communication Laboratories)

1985 Conference on Solid State Devices and Materials |PDF Download

Yoshifumi Kawamoto (1.Central Research Laboratory, Hitachi Ltd.)

1985 Conference on Solid State Devices and Materials |PDF Download

K. Nojiri, K. Tsunokuni, K. Hirobe, A. Koike, K. Ito, S. Kishino (1.Musashi Works, Hitachi, Ltd., 2.Device Development Center, Hitachi, Ltd.)

1985 Conference on Solid State Devices and Materials |PDF Download

Irchiro Mori, Toshiaki Shinozaki, Kazuyoshi Sugihara, Chikara Itoh, Mitsuo Tabata (1.VLSI Research Center, Toshiba Corporation)

1985 Conference on Solid State Devices and Materials |PDF Download

T. Ohiwa, M. Goto, R. Yoshikawa, H. wada, T. Tojo, Y. Muraguchi (1.VLSI Research Center, Toshiba Corporation)

1985 Conference on Solid State Devices and Materials |PDF Download