[S-II-11] Lift-off Planarization Process for Josephson IC Multilevel Interconnections

Ichiro ISHIDA、Syuuichi TAHARA、Yumi AJISWA、Yoshifusa WADA (1.Microelectronics Res. Labs., NEC Corporation)

1987 Conference on Solid State Devices and Materials |PDF ダウンロード

[S-II-12] Low Temperature Chemical Vapor Deposition of Dielectric Films using Ozone and Organosilane

Y. Nishimoto、N. Tokumasu、T. Fukuyama、K. Maeda (1.Technology Center, Applied Materials Japan Inc.)

1987 Conference on Solid State Devices and Materials |PDF ダウンロード

[S-II-13] Liquid Phase Oxidation Employing O Atoms Produced by Microwave Discharge and Si(CH3)4

S. Noguchi、H. Okano、Y. Horiike (1.Heavy Apparatus Engineering Laboratory, Toshiba Corp.、2.VLSI Research Center, Toshiba Corp.)

1987 Conference on Solid State Devices and Materials |PDF ダウンロード

[S-II-14] Effect of Stress on Electromigration MTF in Al Based Interconnections

S. Shingubara、S. Iwabuchi、S. Shima (1.Toshiba VLSI Research Center)

1987 Conference on Solid State Devices and Materials |PDF ダウンロード

[S-III-1] Atom-Probe and Scanning Tunneling Microscope Studies of Surfaces and Interfaces

Osamu Nishikawa (1.Tokyo Institute of Technology)

1987 Conference on Solid State Devices and Materials |PDF ダウンロード

[S-III-2] Interfacial Super Structure between Epitaxial Si(111) Layers and B(√3 x √3)/Si(111) Substrates Studied by Synchrotron X-Ray Diffraction

K. Akimoto、J. Mizuki、I. Hirosawa、T. Tatsumi、H. Hirayama、N. Aizaki、J. Matsui (1.Fundamental Research Laboratories, NEC Corporation)

1987 Conference on Solid State Devices and Materials |PDF ダウンロード

[S-III-3] Micro RBS Analysis by Focused 1.5MeV Ion Beam

A. KINOMURA、K. MATSUNAGA、K. INOUE、M. IZUMI、M. TAKAI、K. GAMO、S. NAMBA、M. KIUCHI、M. SATOU (1.Faculty of Engineering Science, Osaka University、2.Government Industrial Research Institute Osaka)

1987 Conference on Solid State Devices and Materials |PDF ダウンロード

[S-III-4] Digital Epitaxy of III-V Compound Semiconductors

Akira Usui (1.Fundamental Research Laboratories, NEC Corporation)

1987 Conference on Solid State Devices and Materials |PDF ダウンロード

[S-III-5] Growth of AlGaAs by Atomic Layer Epitaxy using a Pulsed Vapor Phase Method

M. Ozeki、N. Ohtsuka、K. Mochizuki、K. Kodama (1.Fujitsu Laboratories Ltd. Atsugi)

1987 Conference on Solid State Devices and Materials |PDF ダウンロード

[S-III-6] Correlation between Atomic-Scale Structures and Electronic Properties at Compound Semiconductor Layered Interfaces

Hideki HASEGAWA、Hideo OHNO、Tetsuya HAGA、Yutaka ABE、Heishichirou TAKAHASHI、Takayuki SAWADA、Li HE、Hirotatsu ISHII (1.Department of Electrical Engineerirg, Faculty of Engineering Hokkaido Uuiversity、2.Dept. of Nuclear Eng.、3.Dept. of Metallurgical Eng.、4.Dept. of Electronic Eng., University of Electro-Communications)

1987 Conference on Solid State Devices and Materials |PDF ダウンロード