[S-D-7] High Reliability of Ultrathin Improved SiN on Poly Si

Shigeaki Ide、Hisakazu Miyatake、Hideo Komiya、Masatoshi Ohshima (1.VLSI Development Laboratories IC Group SHARP Corporation)

1989 Conference on Solid State Devices and Materials |PDF ダウンロード

[S-D-8] Conduction in Thin Nitride Films and Oxide/Nitride Films

Kiyoteru Kobayashi、Hiroshi Miyatake、Makoto Hirayama (1.LSI Research & Development Laboratory, Mitsubishi Electric Corp.)

1989 Conference on Solid State Devices and Materials |PDF ダウンロード

[S-D-9] Two Mechanisms for Interface State Generation in n-MOSFETs

Naoki YASUDA、Kenji TANIGUCHI、Chihiro HAMAGUCHI (1.Department of Electronic Engineering, Osaka University、2.Semiconductor Device Engineering Lab., Toshiba, Corporation)

1989 Conference on Solid State Devices and Materials |PDF ダウンロード

[S-E-1] Applications of Synchrotron Radiation to Material Characterization

Masami Ando (1.Photon Factory, KEK)

1989 Conference on Solid State Devices and Materials |PDF ダウンロード

[S-E-2] Semiconductor Interface and Surface Structure Studies by Means of Grazing Incidence X-Ray Diffraction

Koichi AKIMOTO、Jun'ichiro MIZUKI、Ichiro HIROSAWA、Junji MATSUI (1.Fundamental Research Laboratories, NEC Corporation、2.Research and development Group, NEC Corporation)

1989 Conference on Solid State Devices and Materials |PDF ダウンロード

[S-E-3] Semiconductor Surface Characterization by Total Reflection X-Ray Fluorescence Analysis

Atsuo IIDA (1.Photon Factory, National Laboratory for High Energy Physics)

1989 Conference on Solid State Devices and Materials |PDF ダウンロード

[S-E-4] X-Ray Topographic Observations of Defects in As-Grown Silicon Single Crystals

Tetsuya ISHIKAWA (1.Department of Applied Physics, The University of Tokyo)

1989 Conference on Solid State Devices and Materials |PDF ダウンロード

[S-E-5] Ge/Si Monolayer Superlattices on Si(100) Studied by Surface-Sensitive EXAFS

Hiroyuki OYANAGI、Tsunenori SAKAMOTO、Kunihiro SAKAMOTO、Hirotaka YAMAGUCHI、Takafumi YAO (1.Electrotechnical Laboratory)

1989 Conference on Solid State Devices and Materials |PDF ダウンロード

[S-E-6] Structure Investigation of Amorphous Silicon Nitrides by Si･K-EXAFS

Asao Nakano、Kiyoshi Ogata、Masahiro Tanaka (1.Production Engineering Research Laboratory, Hitachi, Ltd.)

1989 Conference on Solid State Devices and Materials |PDF ダウンロード

[S-E-7] Synchrotron Radiation Photoemission Spectroscopy of Epitaxially-Grown Fluoride Films/GaAs Interfaces

Masaharu OSHIMA、Yasuko YAMADA-MARUO、Ruth KLAUSER (1.NTT Applied Electronics Laboratories、2.ISSP, University of Tokyo)

1989 Conference on Solid State Devices and Materials |PDF ダウンロード