[S-B-6] Thermal Desorption of Native Oxides Formed on Si(111) during Chemical Treatments

Y. KOBAYASHI、Y. SHINODA、K. SUGII (1.NTT Electrical Communications Laboratories)

1989 Conference on Solid State Devices and Materials |PDF ダウンロード

[S-B-7] A Non-Destructive Surface and Interface Study of Very-Thin-Film/Substrate Contact Systems Using Soft X-ray Spectroscopy

Motohiro IWAMI、Masaaki HIRAI、Masahiko KUSAKA、Hatsuo NAKAMURA、Fumio AKAO (1.Research Laboratory for Surface Science, Faculty of Science, Okayama University、2.Osaka Electro-Communication University、3.Department of Electronic Engineering, Okayama University of Science)

1989 Conference on Solid State Devices and Materials |PDF ダウンロード

[S-B-8] Particle Deposition Mechanism onto Si Wafer

A. Saito、K. Ohta、M. Watanabe、H. Oka (1.Production Engineering Research Laboratory, Hitachi Ltd.)

1989 Conference on Solid State Devices and Materials |PDF ダウンロード

[S-B-9] Reduction of Interface States of MOS Structure Using Photo-CVD SiO2 Film by F2 Treatment

Masakazu NAKAMURA、Masanori OKUYAMA、Yoshihiro HAMAKAWA (1.Department of Electrical Engineerirg, Faculty of Engineering Science, Osaka University)

1989 Conference on Solid State Devices and Materials |PDF ダウンロード

[S-B-10] Characterization of Si-SiO2 Interfaces Formed after Photo-Excited Cleaning

Rinshi SUGINO、Ritsuo TAKIZAWA、Yasuhisa SATO、Takashi ITO (1.FUJITSU LABORATORIES LTD.)

1989 Conference on Solid State Devices and Materials |PDF ダウンロード

[S-B-11] Reverse-Bias Current Reduction in Low-Temperature-Annealed pn Junctions Using a UHV Ion-Implanter

Y. Ishihara、A. Okita、K. Yoshikawa、T. Shibata、T. Ohmi、T. Nitta、J. Sugiura、N. Ohwada (1.Department of Electronics Faculty of Engineering Tohoku University、2.Device Development Center, Hitachi Ltd.)

1989 Conference on Solid State Devices and Materials |PDF ダウンロード

[S-B-12] Outgas-Free, Corrosion-Free Metal Surfaces for ULSI Manufacturing

K. Sugiyama、T. Ohmi、N. Miki、Y. Nakahara (1.Department of Electronics, Faculty of Engineering, Tohoku University、2.R&D Division, Hashimoto Chemical Ltd.、3.Technical Center, Osaka Sanso Kogyo Co., Ltd.)

1989 Conference on Solid State Devices and Materials |PDF ダウンロード

[S-C-1] GaAs/AlGaAs Optical Interconnection Chip for Neural Network

Yoshikazu NITTA、Jun OHTA、Kazumasa MITSUNAGA、Masanobu TAKAHASHI、Syuichi TAI、Kazuo KYUMA (1.Mitsubishi Electric Corporation, Central Research Laboratory)

1989 Conference on Solid State Devices and Materials |PDF ダウンロード

[S-C-2] Vertical to Surface Transmission Electro-Photonic Device for the Application of Optical Interconnection and Processing

Kenichi KASAHARA、Yoshiharu TASHIRO、Ichiro OGURA、Mitunori SUGIMOTO、Shigeru KAWAI、Keiichi KUBOTA (1.Opto-Electronics Res. Labs., NEC Corporation)

1989 Conference on Solid State Devices and Materials |PDF ダウンロード

[S-C-3] Module Assembly Technology for Optical Multi-Interconnection Devices -InP Based 4x4 Optical Switch-

Takeshi KATO、Fumio YUUKI、Hiroaki INOUE、Ken'ichi MIZUISHI、Koji ISHIDA (1.Central Research Laboratory, Hitachi Ltd.)

1989 Conference on Solid State Devices and Materials |PDF ダウンロード