K. Yamashita、N. Nomura (1.Semiconductor Research Center, Matsushita Electric Industrial Co., Ltd.)

1990 International Conference on Solid State Devices and Materials |PDF ダウンロード

Dan Maydan (1.Applied Materials, Inc.)

1990 International Conference on Solid State Devices and Materials |PDF ダウンロード

T. Abe、M. Nakano、T. Itho、T. Takei、A. Uchiyama、K. Yoshizawa、Y. Nakazato (1.Shin-Etsu Handotai、2.Nagano Denshi)

1990 International Conference on Solid State Devices and Materials |PDF ダウンロード

H. Okano、H. Itoh、T. Watanabe、N. Hayasaka、K. Horioka (1.ULSI Research Center, Toshiba Corp.、2.MOS Process Engineering Sec. II Integrated Circuit Advanced Process Engineering Department, Toshiba Corp.)

1990 International Conference on Solid State Devices and Materials |PDF ダウンロード

Eugene A. Irene (1.Department of Chemistry, University of North Carolina)

1990 International Conference on Solid State Devices and Materials |PDF ダウンロード

Nobuyoshi Kobayashi、Hidekazu Goto、Masayuki Suzuki (1.Central Research Laboratory, Hitachi, Ltd.、2.Semiconductor Design & Development Center, Hitachi, Ltd.)

1990 International Conference on Solid State Devices and Materials |PDF ダウンロード

Yoshio Hayashide、Hiroshi Miyatake、Junichi Mitsuhashi、Makoto Hirayama、Takashi Higaki、Haruhiko Abe (1.LSI R&D Lab. Mitsubishi Electric Corp.)

1990 International Conference on Solid State Devices and Materials |PDF ダウンロード

H. Watanabe、N. Aoto、S. Adachi、T. Ishijima、E. Ikawa、K. Terada (1.Microelectronics Research Laboratories, NEC Corporation)

1990 International Conference on Solid State Devices and Materials |PDF ダウンロード

Kuninori KITAHARA、Nobuyuki OHTSUKA、Osamu UEDA、Masashi OZEKI (1.Fujitsu Laboratories Ltd.)

1990 International Conference on Solid State Devices and Materials |PDF ダウンロード

Naoki Kobayashi、Toshiki Makimoto、Yoshiharu Yamauchi、Yoshiji Horikoshi (1.NTT Basic Research Laboratories)

1990 International Conference on Solid State Devices and Materials |PDF ダウンロード