[A-9-4] Diffuser micropump structured with extremely flexible diaphragm of 2 micron-thick polyimide film
2010 International Conference on Solid State Devices and Materials |PDF ダウンロード
2010 International Conference on Solid State Devices and Materials |PDF ダウンロード
2010 International Conference on Solid State Devices and Materials |PDF ダウンロード
2010 International Conference on Solid State Devices and Materials |PDF ダウンロード
2010 International Conference on Solid State Devices and Materials |PDF ダウンロード
2010 International Conference on Solid State Devices and Materials |PDF ダウンロード
2010 International Conference on Solid State Devices and Materials |PDF ダウンロード
2010 International Conference on Solid State Devices and Materials |PDF ダウンロード
2010 International Conference on Solid State Devices and Materials |PDF ダウンロード
2010 International Conference on Solid State Devices and Materials |PDF ダウンロード
2010 International Conference on Solid State Devices and Materials |PDF ダウンロード