The Japan Society of Applied Physics

[H-2-04] Thickness- and orientation-dependence of Curie temperature of ferroelectric epitaxial HfO2 based films

T. Mimura1, T. Shimizu1, Y. Katsuya2, O. Sakata3, H. Funakubo1 (1.Tokyo Institute of Technology (Japan), 2.Synchrotron X-ray Station at SPring-8, Research Network and Facility Services Division (Japan), 3.Synchrotron X-ray Group, Research Center for Advanced Measurement and Characterization, NIMS and Synchrotron X-ray Station at SPring-8, Research Network and Facility Services Division (Japan))

2019 International Conference on Solid State Devices and Materials |2019年9月3日(火) 16:30 〜 16:45 |PDF ダウンロード