The 39th International Conference of Photopolymer Science and Technology

講演情報

印刷

EUV Lithography

[2A501-04] EUV Lithography I

2022年6月29日(水) 09:00 〜 10:40 EUV Lithography (A5)

Chairman:Takeo Watanabe(University of Hyogo), Shinji Yamakawa(University of Hyogo)

09:00 〜 09:30

[2A501] Advanced Photoresists for 0.55 NA EUV Lithography: Status, Progress, and Challenges [Invited]

*Florian Gstrein1,2 (1. Intel, 2. Components Research)