The 39th International Conference of Photopolymer Science and Technology

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Strategies and Materials for Advanced Packaging, Next Generation MEMS, Flexible Devices

[Packaging III] Strategies and Materials for Advanced Packaging, Next Generation MEMS, Flexible Devices

Thu. Jun 30, 2022 1:00 PM - 2:40 PM Strategies and Materials for Advanced Packaging, Next Generation MEMS, Flexible Devices (A10)

Chairman:Tetsuya Enomoto(Showa Denko Materials), Takumi Ueno(Shinshu University)

1:50 PM - 2:10 PM

[3A1012] Negative photo-definable polyimide dry films for fine and high aspect ratio patterning

*Keigo Kato1, Yoshiko Tatsuta1, Kazuyuki Matsumura1, Akira Shimada1 (1. Toray Industries, Inc.)