Negative photo-definable polyimide dry films for fine and high aspect ratio patterning

講演情報

Strategies and Materials for Advanced Packaging, Next Generation MEMS, Flexible Devices

2022年6月30日(木) 13:00 〜 14:40 Strategies and Materials for Advanced Packaging, Next Generation MEMS, Flexible Devices (A10)

Chairman:Tetsuya Enomoto(Showa Denko Materials), Takumi Ueno(Shinshu University)

13:50 〜 14:10

*Keigo Kato¹, Yoshiko Tatsuta¹, Kazuyuki Matsumura¹, Akira Shimada¹ (1. Toray Industries, Inc.)