The 39th International Conference of Photopolymer Science and Technology

講演情報

印刷

Computational / Analytical Approach for Lithography Processes

[A4] Computational / Analytical Approach for Lithography processes

2022年6月30日(木) 09:00 〜 11:30 Computational / Analytical Approach for Lithography Processes (A4)

Chairman:Tomoki Nagai(JSR Corporation), Takahiro Kozawa(Osaka University)

09:30 〜 10:00

[3A402] Application of machine learning to development of chemically amplified resist materials and processes [invited]

*Takahiro Kozawa1 (1. Osaka University)