Oral presentation

8 Plasma Electronics » 8.1 Plasma production and diagnostics

[17p-C204-1~20] 8.1 Plasma production and diagnostics

Sat. Mar 17, 2018 1:15 PM - 6:30 PM C204 (52-204)

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1:15 PM - 1:30 PM

[17p-C204-1] Estimation on spatial distribution of number density of TiO molecule in the thermal plasma during Fe³⁺-doped TiO₂ nanopowder synthesis using induction thermal plasmas

〇Naoto Kodama¹, Yosuke Ishisaka¹, Kotaro Shimizu¹, Kazuki Onda¹, Yasunori Tanaka¹, Yoshihiko Uesugi¹, Tatsuo Ishijima¹, Shiori Sueyasu², Shu Watanabe², Keitaro Nakamura² (1.Kanazawa Univ., 2.Nissin Seifun Group Inc.)

1:30 PM - 1:45 PM

△ [17p-C204-2] Measurement of the Degree of Ionization in a Helium ECR Discharge in a Simple Cusp Field using the Line Intensity Ratio Method

〇(M1)Akira Ueda¹, Taiichi Shikama¹, Tatsuya Teramoto¹, Takanori Higashi¹, Yohei Iida², Masahiro Hasuo¹ (1.Kyoto Univ., 2.Bunkokeiki)

1:45 PM - 2:00 PM

△ [17p-C204-3] Diagnostics of microwave discharge low-pressure argon plasma by multi-optical emission line analysis based on collisional-radiative model

〇(M2)Yuya Yamashita¹, Fuminori Yamazaki¹, Atsushi Nezu^2,3, Hiroshi Akatsuka^3,1 (1.Sch. Eng., Tokyo Tech, 2.Tech. Dept., Tokyo Tech, 3.IIR, Tokyo Tech)

2:00 PM - 2:15 PM

△ [17p-C204-4] Spatiotemporal density in the Non-equilibrium Atmospheric Pressure Ar Plasma

〇Ren Kuramashi¹, Keigo Takeda², Kenji Ishikawa¹, Takayoshi Tsutsumi¹, Hiroshi Hashizume³, Hiromasa Tanaka³, Hiroki Kondo¹, Makoto Sekine¹, Masaru Hori³ (1.Nagoya Univ. Eng., 2.Meijo Univ., 3.Inst. Innovation for Future Society)

2:15 PM - 2:30 PM

△ [17p-C204-5] OES Measurement of Electron Temperature of Non-equilibrium Atmospheric-pressure Ar Plasma

〇(B)Yoshiro Hakozaki¹, Hiroshi Onishi¹, Atsushi Nezu², Hiroshi Akatsuka² (1.Tokyo Tech., 2.IIR Tokyo Tech.)

2:30 PM - 2:45 PM

[17p-C204-6] Pulse-power and discharge-mode dependences for plasma emissions generated by high-power pulsed magnetron sputtering (HPPMS)

〇(B)Hiroshi Nishida¹, Koichi Matsuda¹, Tomonori Syoji¹, Bizi Ichikawa¹, Takumi Oshiro¹, Masaomi Sanekata¹, Hiroaki Yamamoto², Masahide Tona², Keizo Tsukamoto², Motoyoshi Nakano³, Keijiro Ohshimo³, Fuminori Misaizu³ (1.Tokyo Polytechnic Univ., 2.Ayabo Corp, 3.Tohoku Univ.)

2:45 PM - 3:00 PM

△ [17p-C204-7] Behavior of ion in high power impulse magnetron sputtering plasma using carbon target

〇(M1)Kazunori Iga¹, Akinori Oda², Hiroyuki Kousaka³, Takayuki Ohta¹ (1.Meijo Univ., 2.Chiba Inst. Technol., 3.Gifu Univ.)

3:00 PM - 3:15 PM

△ [17p-C204-8] Numerical trajectory analysis of high-energy negative ion in magnetron plasma

〇(M1)Kou Udagawa¹, Akihiro Mitsuya¹, Haruka Suzuki¹, Hirotaka Toyoda¹ (1.Nagoya Univ.)

3:30 PM - 3:45 PM

△ [17p-C204-9] Mode mapping of inductively coupled plasma in terms of antenna current and voltage

〇(M2)Makato Moriyama¹, Ivan Ganachev^1,2, Keiji Nakamura¹ (1.Chubu Univ., 2.Shibaura Mechatronics)

3:45 PM - 4:00 PM

△ [17p-C204-10] Limiting factor of the generation of electronegative oxygen ions with after-arc plasma using global model

〇Hisashi Kitami^1,2, Junichi Nomoto², Toshiyuki Sakemi¹, Hisaso Makino^2,3, Yasushi Aoki¹, Tetsuya Yamamoto² (1.Sumitomo Heavy Industries, Ltd., 2.Research Inst., Kochi Univ. Tech., 3.Kochi Univ. Tech.)

4:00 PM - 4:15 PM

[17p-C204-11] Investigation of characteristics of pulsed discharge in pressurized water

〇Haruka Takagi¹, Shinobu Mukasa¹, Masahiro Matsuda¹, Shinfuku Nomura¹ (1.Ehime Univ.)

4:15 PM - 4:30 PM

[17p-C204-12] Influence of Pulse Modulation on Microwave Excited Plasma Production Using Water as a Source Gas

〇Takeshi Aizawa¹, Hiroaki Suzuki¹, Taishin Shimada¹, Tatsuo Ishijima¹, Yasunori Tanaka¹, Yoshihiko Uesugi¹ (1.Kanazawa Univ.)

4:30 PM - 4:45 PM

[17p-C204-13] Microwave plasma production in a gap of coaxial-waveguide outer conductor

〇(M1C)Shohei Fujimura¹, Haruka Suzuki¹, Kensuke Sasai¹, Hirotaka Toyoda¹ (1.Nagoya Univ.)

4:45 PM - 5:00 PM

[17p-C204-14] Purifying of fullerene ion beam on ECR ion source

〇Koji Onishi¹, Yuto Tsuda¹, Takuto Watanabe¹, Tatsuto Takeda¹, Kouta Hamada¹, Takashi Uchida², Muramatsu Masayuki³, Atsushi Kitagawa³, Yoshikazu Yoshida², Yushi Kato¹ (1.Osaka Univ., 2.Toyo Univ., 3.NIRS)

5:00 PM - 5:15 PM

[17p-C204-15] Characteristics of igniting and sustaining ECR plasma and ion beam currents under extremely low microwave powers by using wireless on magnetic field configuration and gas pressures

〇(M2)Takuto Watanabe¹, tsuda yuto¹, onishi koji¹, hamada kota¹, takeda tatsuto¹, ono yohei², omori takayuki², kato yushi¹ (1.Osaka Univ., 2.Osaka Univ.)

5:15 PM - 5:30 PM

[17p-C204-16] Enhanced production of electron cyclotron resonance plasma by DC biased plate-tuner

〇Kota Hamada¹, Takuto Watanabe¹, Yuto Tsuda¹, Koji Onishi¹, Tatsuto Takeda¹, Yushi Kato¹ (1.Osaka Univ.)

5:30 PM - 5:45 PM

[17p-C204-17] Optimization of heavy ion beam under various producing conditions of ECR ion source plasma.

〇Yuto Tsuda¹, Takuto Watanabe¹, Koji Onishi¹, Tatsuto Takeda¹, Kota Hamada¹, Yushi Kato¹ (1.Osaka Univ.)

5:45 PM - 6:00 PM

[17p-C204-18] Experimental condition of producing multi-charged Xe ion beams and
controling their energy by decelerating electrodes

〇Tatsuto Takeda¹, Yuto Tsuda¹, Takuto Watanabe¹, Koji Onishi¹, Kouta Hamada¹, Yasutaka Inanaga², Yushi Kato¹ (1.Osaka Univ., 2.Mitsubishi Electric)

6:00 PM - 6:15 PM

[17p-C204-19] Effects of double-split-ring resonators to plasma local behavior powered by microwaves

〇(DC)Akinori Iwai¹, Yoshihiro Nakamura¹, Osamu Sakai² (1.Kyoto Univ., 2.Univ. Shiga Pref.)

6:15 PM - 6:30 PM

[17p-C204-20] Spatial distribution of power absorption in atmospheric pressure microwave line plasma

〇(M1)Yousuke Koike¹, Yuto Tamura¹, Haruka Suzuki¹, Hirotaka Toyoda¹ (1.Nagoya Univ.)

Session information